Table of contents

 

Table of contents. 1

General Laboratory Information. 2

Emergency Information. 3

Evacuation procedures. 3

First-aid kit 3

Spill cleanup materials. 3

Chemicals in the Lab. 4

Chemical Container Disposal 5

Chemical storage. 5

Health & Safety References. 5

Material Safety Data Sheets (MSDS): 5

Standard Operating Procedures for High Hazard Lab Operations. 6

Acid / Base Processing. 6

Preparation. 7

Chemical Storage and Bottle Disposal 7

Pouring of Chemicals. 7

Wafer Process. 7

Clean Up. 8


General Laboratory Information

 

 

 

Principal Investigator:    Professor Noel MacDonald

Lab Engineer:                           David Bothman, Bothman@engineering.ucsb.edu

                                               

Laboratory Location(s) (Building /Rooms): Engineering II / Room 2232, 2234

 

 

 

         

 

              

Department Information

 

Department Safety  Representative:  Mary Dinh, dinh@engineering.ucsb.edu

 

 

         

Location of Department Safety Bulletin Board :

Engineering II / Room 2335 (Xerox Room)

 

 

 

Location of Building Emergency Assembly Point :

East of Engineering II, North of ITP

              

 

     


 

Emergency Information

 

 

 

Evacuation  procedures

Wet Benches

Turn off heated baths

Cover processing tanks

Close any open chemical bottles

 

 Furnace

Make sure that the furnace tubes are sealed.

 

 

 

 

 

First-aid kit

     The First-aid kit is the lab on the wire shelves next to the solvent bench

    

 

 

 

 

 

 

Spill cleanup  materials 

Chemical spill cleanup kits are also on the wire shelves next to the solvent bench

 

 

 

 

 

 

Laboratory monitors or alarms 

Oxidation furnace: acknowledge the alarm, notify lab staff

 

Wet benches – liquid level alarm: Do not pour any more chemicals into the processing bath drains. Notify lab staff.

 

 


 

Chemicals in the Lab

The following chemicals are approved for use in the MEMS Fab. Consult with lab  staff before using or storing any other chemicals in the lab.

 


Chemical Container Disposal

 

Acids and Bases           TRIPLE rinse containers with water, cap and dispose.

Solvents                       After the container is completely empty the UNCAPPED bottle can be thrown in the trash.

Viscous Chemicals        Chemicals that are too viscous (e.g. resists) to empty completely should be capped and put in a grey drum for EH&S pickup.

 

Chemical storage

Acids and Bases           UNOPENED containers are stored in the corrosives cabinet

                                    Opened containers are stored on the chemical cart by the Acid/Base wet benches.

Solvents                       All solvent containers are stored in the flammable cabinet.