resist	spin	soft bake	expose	hard bake	develop	target thickness	Other steps
AZ P4330 RS	30 s at 5 krpm	1 min at 95 C	Karl Suss: ~14 s	1 min at 105 C	4 to 4.5 min	~ 3.2 microns
					in AZ 400K 1:4
AZ P4110	30 s at 4 krpm	1 min at 95 C	Karl Suss: ~10 s	?	~1.5 min	~1.2 microns
					in AZ 400K 1:4
AZ 5214 (negative)	30 s at 4 krpm	1 min at 95 C	Karl Suss: ~10 s	1 min at 112 C	flood expose 1 min	~1.3 microns
					then
					~1 min
					in AZ 400K 1:5.5
SPR220-7.0	3.0K for 30 sec	90 C for 100sec + 100C for 100 sec	30 sec in Contact Aligner	115C for 90 sec	60-90sec in MF701	7.5 microns