| resist |
spin |
soft bake |
expose |
hard bake |
develop |
target
thickness |
Other steps |
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| SPR510A |
30 s at 4
krpm |
1.5 min at
90 C |
stepper: ~
0.95 s |
1 min at 105
C |
~1 min |
~ 1.1 micron |
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in MF701 |
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| AZ 4620 |
ramp up to |
100 s at 110 C |
stepper: ~1.65 s |
- |
~1.5 min |
~7.4 microns |
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30 s at 4 krpm |
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Karl Suss: ~20s |
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in AZ 400K 1:4 |
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| SPR518 |
30 s at 3krpm |
1 min at 90 C |
Stepper~ 1.1 s Focus Offset=12?? |
1 min at 105 C |
90 s in MF701 |
~2.1 microns |
Rinse in Di
3 min after developing |
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| AZ4210 |
5K for 30sec |
95 for 1min |
Stepper ~0.64 sec |
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AZ400K 1:4 for 65 sec/150 if hardbaked |
2.1 microns |
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| SPR 950 |
3.5K for 30 sec |
90C for 1 min |
1.7sec in Stepper |
2min at 100C |
Rinse in DI 30 sec PRIOR to develop in MF701 2min 20sec |
0.8 microns |
Spin 365CEM at 3.5Kb/w 3 and 4 for 30 sec for contrast
enhancement. |
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| SPR220-7.0 |
3.0K for 30
sec |
90 C for
100sec + 100C for 100 sec |
Stepper:
~4sec Contact
Aligner: ~30 sec |
115C for 90
sec |
60-90sec in
MF701 |
7.5 microns |
Hold time ~30 mins
between exposure and Hard bake |
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| AZ
9260 |
3.0K for 30
sec |
110 C for 80
sec: 10um: then 2nd coat |
6.5 sec in
stepper |
None |
AZ 400K 1:4
for 300 sec |
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AZ300T
at 80C for stripping |
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3.0K for 30
sec |
110 C for 160 sec: total 24 um |
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24um |
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