Dr. Masaru Rao
Post Doctoral Researcher
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Micromirror-based MOEMS, novel materials and composite architectures for improvement of reliability of MEMS structures, low temperature wafer bonding for optoelectromechanical integration.
Educational Background:
B.S. Materials Science & Engineering, University of Florida, 1995
emphasis in metallurgical engineering
Ph.D. Materials Engineering, University of California, Santa Barbara, 2001
emphasis in processing/structure/property relationships in structural ceramics
Work Experience:
Graduate Research Assistant, Materials Dept, UCSB, 1995-2001
Developed novel method for improving reliability of brittle materials through the use of laminar composite architecture composed of crack-arresting compressive layers. Work included modeling of crack arrest phenomena and fabrication, characterization, mechanical testing, and fractographaphic analysis of laminar ceramic composites.
Consulting Engineer, Avicron Technologies Inc, Santa Maria, CA 2001
Worked on process development for fabrication of advanced planar optoelectronic devices.
Post-Doctoral Researcher, Mechanical Engineering Dept, UCSB, 2001-present
Working on process design and development for next-generation micromirror devices; development of novel materials and composite architectures for improvement of reliability of MEMS structures; and low temperature wafer bonding for optoelectromechanical integration.
Publications:
K. Subramanian, M. P. Rao, A. Riley, G. Cole, S. Boeshore, and N. C. MacDonald, “Multilevel vertical comb drive-based scanning micromirors fabricated using oxidation-based electrical isolation and shadow masking,” work in progress.
F. F. Lange, M. P. Rao, K. Hbaieb, and R. M. McMeeking, "Ceramics that exhibit a threshold strength," in Ceramic Armor Materials by Design, Ceramic Trans. 134, ed by JW. McCauley, A. Crowsen, W.A. Gooch, Jr., A.M. Rajendran, S.J. Bless, Kathryn V Logan, M. Normandia and S. Wax, Pub by Am. Ceram. Soc, Westerville, Ohio, pp 499-510 (2002).
M. G. Pontin, M. P. Rao, A. J. Sanchez-Herencia, and F. F. Lange, “Laminar ceramics utilizing the zirconia tetragonal-to-monoclinic phase transformation to obtain a threshold strength,” J. Am. Ceram. Soc. 85 (2002) pp. 3041-48.
M. P. Rao and F. F. Lange, “Factors affecting threshold strength in laminar ceramics containing thin compressive layers,” J. Am. Ceram. Soc. 85 (2002) pp. 1222-28.
M. P. Rao, J. Rödel, and F. F. Lange, “Residual stress induced R-curves in laminar ceramics that exhibit a threshold strength,” J. Am. Ceram. Soc. 84 (2001) pp. 2722-24.
M. L. Fisher, M. Colic, M. P. Rao, and F. F. Lange, “Effect of silica nanoparticle size on the stability of alumina/silica suspensions,” J. Am. Ceram. Soc. 84 (2001) pp. 713-18.
M. P. Rao, A. J. Sanchez-Herencia, G. E. Beltz, R. M. McMeeking, and F. F. Lange, “Laminar ceramics that exhibit a threshold strength,” Science 286 (1999) pp. 102-05.