Dissertations

Adam Monkowski
Microfabricated Structures and Devices
Featuring Nanostructured Titania Thin Films
July 2007

  

Seth Boeshore
Aluminum Nitride Thin Films on Titanium:
Piezoelectric Transduction on a Metal Substrate
August 2006
Emily Parker
Bulk Micromachined Titanium Microneedles for Minimally Invasive Drug Delivery
June 2006
Yanting Zhang
Bulk Titanium Microfluidic Devices
January 2006
Garrett D. Cole
MEMS-Tunable Vertical-Cavity SOAs
October 2005

Lori Ann Callaghan
Design, Fabrication, and Characterization of Beam-Supported Aluminum Nitride Thin Film Acoustic Resonators
June 2005
Zuruzi Abu Samah
Integration of Nanostructured Titania into microsystems
May 2005
Marco Aimi
Bulk Titanium Microelectromechanical Systems
April 2005
Adam Pyzyna
Thermal Oxidation-Induced Strain In Silicon Nanobeams
December 2004
Alok Paranjpye
A Nanoscale Composite Material for Enhanced Damage Tolerance in Micro and Nano-Electro-Mechanical Systems and Structures
November 2004
Kanakasabapathi Subramanian
Single Mask, Multiple Level Single Cystal Silicon Processes: MEMS Out-of-Plane Actuators and 3-D Wire Arrays
May 2003