Rudiyanto (Rudi) Gunawan
gunawan@engineering.ucsb.edu
Department of Chemical Engineering
(805) 637-5912
EDUCATION
2003 Ph.D.
Chemical Engineering,
Thesis title: Modeling
and Control of Transient Enhanced Diffusion of Boron in Silicon
Thesis advisers: Richard D. Braatz and Edmund G. Seebauer (GPA = 3.91)
2000 M.S. Chemical Engineering,
Thesis title: Dimensionality Reduction and Robustness Analysis of Large Scale Systems
Thesis adviser: Richard D. Braatz
1998 B.S.
Chemical Engineering & Mathematics,
Graduated with Highest Distinction (GPA = 3.96)
Dean’s Honor List 1994 – 1998
Hotaling Scholarship 1997 (given to the top 5% of
undergraduates in
DOCTORAL and POSTDOCTORAL RESEARCH
Postdoctoral Fellow,
Performed
research in the area of systems biology with interests in optimal experiment
design, systems identification, dynamical sensitivity analysis, and discrete
stochastic systems; with applications in circadian rhythm, frog egg cell cycle,
genetic toggle switch, enzymatic futile cycle, and apoptosis.
Developed
iterative experiment design procedure and optimal measurement selection for
iterative model development of biological systems, applied to the
identification of caspase-activated apoptosis model.
Developed
dynamical sensitivity analysis for discrete stochastic systems, applied to gene
regulatory models for circadian rhythm and genetic toggle switch.
Developing
dynamical phase sensitivity analysis for biological oscillatory systems,
applied to circadian rhythm phase resetting.
Developing
methodologies for the design of bistable genetic switch using bifurcation
analysis and explicit stochastic approach, applied to enzymatic futile cycle
and synthetic gene switch.
Actively involved
in the development of sensitivity analysis tools BioSens, as part of
open-source computational biology tools Bio-SPICE funded by DARPA BioComp
program.
Actively involved in the collaborative work
(UCSB, UC Berkeley, UCLA, Walter Reed, Thomas Jefferson U, Indiana U, KGI, NYU,
SRI) of modeling staphylococcal enterotoxin B-apoptosis pathway in kidney cells
as part of Bio-SPICE (DARPA BioCOMP Project).
Research Assistant,
Performed
research in the area of control systems with interests in robust control,
optimal control, model reduction, experiment design, model identification, and
hyperbolic systems; with applications in time delay systems, batch
crystallization, microelectronics processing, and particulate systems.
Developed model
reduction and robustness analysis techniques for large-scale multivariable
systems with uncertain time delays.
Developed and
applied optimal experiment design to determine kinetic parameters for
nucleation and growth in batch crystallization of potassium
dihydrogen-phosphate.
Developed and
analyzed a reaction-diffusion model for transient enhanced diffusion (TED) of
boron in Si during the manufacture of ultrashallow p-n junctions for advanced
CMOS.
Employed maximum
likelihood and Bayesian parameter estimation to identify the TED kinetic
parameters from literature and experimental data provided by International
Sematech.
Designed the
optimal annealing procedure that achieves the optimal p-n junction thickness.
Developed a worst
case analysis for the manufacture of ultrashallow p-n junctions to quantify the
effects of model parameter uncertainties and control implementation errors.
Developed high
resolution methods for simulating population balance equations from batch
crystallization modeling with size-independent and -dependent growth rates and
aggregation.
Developed a
software package Particle Solver based on the finite volume method for
simulating general particulate system dynamics described by population balance
equations.
GRANTS AND FELLOWSHIPS
UIUC
Graduate Student Travel Grant 2002
PROFESSIONAL ACTIVITIES
Member, American Institute of Chemical Engineers
Member, IEEE
Reviewer, Automatica (nominated as Automatica outstanding
reviewer for 2004)
BIBLIOGRAPHY
Patent:
1.
“Methods for
Controlling Dopant Concentration and Activation in Semiconductor Structures”
with E. G. Seebauer, R. D. Braatz and M. Y. L. Jung, patent application 8/2004.
Book Chapter:
1.
R. Gunawan, K.
Gadkar, and F. J. Doyle III. Methods to Identify Cellular Architecture and
Dynamics from Experimental Data. In J. Stelling (Ed.), System Modeling in
Cellular Biology: From Concepts to Nuts and Bolts, MIT Press, 2005. in press
Journal Articles:
1.
R. Gunawan and F.
J. Doyle III. Isochron-based Phase Sensitivity Analysis of Oscillatory Systems,
2005. in preparation
2.
K. Gadkar, R.
Gunawan, and F. J. Doyle III. Iterative approach to model identification of
biological networks, BMC Bioinformatics,
2005. in press
3.
R. D. Braatz, R.
C. Alkire, E. G. Seebauer, E. Rusli, R. Gunawan, T. O. Drews, X. Li, and Y. He.
Perspectives on the dynamics and control of multiscale systems, J. Process Control, 2005. in press
4.
R. Gunawan, Y.
Cao, L. Petzold, and F. J. Doyle III. Sensitivity analysis of discrete
stochastic system. Biophys. J, 88:2530-2540,
2005.
5.
M. Y. L. Jung, R. Gunawan, R. D. Braatz, and E. G.
Seebauer. Pair diffusion
and kick-out: Contributions to diffusion of boron in silicon. AIChE J., 50:3248-3256, 2004.
6.
R. Gunawan,
7.
M. Y. L. Jung, R. Gunawan, R. D. Braatz, and E. G.
Seebauer. Effect of
near-surface band bending on dopant profiles in ion-implanted silicon. J.
Appl. Phys., 95:1134-1140, 2004.
8.
M. Fujiwara, J.
C. Pirkle Jr., T. Togkalidou, D. L. Ma, R. Gunawan, and R. D. Braatz. A
holistic approach to materials process design. J. Materials Edu.,
24:65-70, 2004.
9.
M. Y. L. Jung, R. Gunawan, R. D. Braatz, and E. G.
Seebauer. A simplified
picture for transient enhanced diffusion of boron in silicon. J.
Electrochem. Soc., 151:G1-G7, 2004.
10. R. Gunawan, M. Y. L.
Jung, R. D. Braatz, and E. G. Seebauer. Optimal control of rapid thermal annealing in a
semiconductor process. J. Process Control,
14:423-430, 2004.
11. K. Dev, M. Y. L. Jung, R.
Gunawan, R. D. Braatz, and E. G. Seebauer. Mechanism for coupling between properties of
interfaces and bulk semiconductors. Phys. Rev. B., 68:195311-195316, 2003.
12. M. Y. L. Jung, R.
Gunawan, R. D. Braatz, and E. G. Seebauer. Ramp-rate effects on transient enhanced diffusion and
dopant activation. J. Electrochem. Soc.,
150:G838-G842, 2003.
13. R. Gunawan, M. Y. L.
Jung, R. D. Braatz, and E. G. Seebauer. Parameter sensitivity analysis applied to modeling
transient enhanced diffusion and activation of boron in silicon. J.
Electrochem. Soc., 150:G758-G765, 2003.
14. R. Gunawan, M. Y. L.
Jung, R. D. Braatz, and E. G. Seebauer. Maximum a posteriori estimation of transient enhanced
diffusion kinetics. AIChE J.,
49:2114-2123, 2003.
15. R. Gunawan, D. L. Ma, M. Fujiwara, and R. D. Braatz.
Identification of kinetic parameters in a multidimensional crystallization
process. Int. J. Modern Phys. B,
16:367-374, 2002.
16. R. Gunawan, E. L. Russell, and R. D. Braatz.
Comparison of theoretical and computational characteristics of dimensionality
reduction methods for large scale uncertain systems. J. Process Control,
11:543-552, 2001.
Peer-reviewed Conference Proceedings:
1.
R. Gunawan, M. Y. L. Jung, E. G. Seebauer, and R. D.
Braatz. Optimal control of transient
enhanced diffusion. In Proc. of the IFAC
Symp. on Advanced Control of Chemical Processes, pp. 603-608, Hong Kong,
2.
R. Gunawan, M. Y. L. Jung, R. D. Braatz and E. G.
Seebauer. Systems Analysis Applied to
Modeling Dopant Activation and TED in Rapid Thermal Annealing. In Proc. of
the 10th IEEE Intl. Conf. on Advanced Thermal Processing of
Semiconductors, pp. 107-110, 2002.
3.
R. Gunawan, E. L.
Russell, and R. D. Braatz. Robustness analysis of multivariable systems with
time delays. In Proc. of European Control Conf., pp. 1882-1887,
4.
M. Y. L. Jung, R. Gunawan, R. D. Braatz, and E. G.
Seebauer. New physics for modeling
transient enhanced diffusion in RTP. In Rapid
Thermal & Other Short-Time Processing Technologies, vol. 2000-9, pp.
15-20, 2000. The Electrochemical Society.
Invited Lectures:
1.
Department of
Chemical Engineering.
2.
Department of
Chemical Engineering.