Dissertations

 

Trent Huang
Bulk-Titanium Waveguide – a pioneering approach for uniplanar microwave circuits and RFMEMS, September 2007

Changsong Ding
Bulk-Titanium for MEMS Switches
July 2007

Adam Monkowski
Microfabricated Structures and Devices
Featuring Nanostructured Titania Thin Films

July 2007

 

Seth Boeshore
Aluminum Nitride Thin Films on Titanium:
Piezoelectric Transduction on a Metal Substrate
August 2006

Emily Parker
Bulk Micromachined Titanium Microneedles for Minimally Invasive Drug Delivery
June 2006

Yanting Zhang
Bulk Titanium Microfluidic Devices
January 2006

Garrett D. Cole
MEMS-Tunable Vertical-Cavity SOAs
October 2005

Lori Ann Callaghan
Design, Fabrication, and Characterization of Beam-Supported Aluminum Nitride Thin Film Acoustic Resonators
June 2005

Zuruzi Abu Samah
Integration of Nanostructured Titania into microsystems
May 2005

Marco Aimi
Bulk Titanium Microelectromechanical Systems
April 2005

Adam Pyzyna
Thermal Oxidation-Induced Strain In Silicon Nanobeams
December 2004

Alok Paranjpye
A Nanoscale Composite Material for Enhanced Damage Tolerance in Micro and Nano-Electro-Mechanical Systems and Structures
November 2004

Kanakasabapathi Subramanian
Single Mask, Multiple Level Single Cystal Silicon Processes: MEMS Out-of-Plane Actuators and 3-D Wire Arrays

May 2003