Dissertations
Trent Huang Bulk-Titanium Waveguide – a pioneering approach for uniplanar microwave circuits and RFMEMS, September 2007
Changsong Ding Bulk-Titanium for MEMS Switches July 2007
Adam Monkowski Microfabricated Structures and Devices Featuring Nanostructured Titania Thin Films July 2007
Seth Boeshore Aluminum Nitride Thin Films on Titanium: Piezoelectric Transduction on a Metal Substrate August 2006
Emily Parker Bulk Micromachined Titanium Microneedles for Minimally Invasive Drug Delivery June 2006
Yanting Zhang Bulk Titanium Microfluidic Devices January 2006
Garrett D. Cole MEMS-Tunable Vertical-Cavity SOAs October 2005
Lori Ann Callaghan Design, Fabrication, and Characterization of Beam-Supported Aluminum Nitride Thin Film Acoustic Resonators June 2005
Zuruzi Abu Samah Integration of Nanostructured Titania into microsystems May 2005
Marco Aimi Bulk Titanium Microelectromechanical Systems April 2005
Adam Pyzyna Thermal Oxidation-Induced Strain In Silicon Nanobeams December 2004
Alok Paranjpye A Nanoscale Composite Material for Enhanced Damage Tolerance in Micro and Nano-Electro-Mechanical Systems and Structures November 2004
Kanakasabapathi Subramanian Single Mask, Multiple Level Single Cystal Silicon Processes: MEMS Out-of-Plane Actuators and 3-D Wire Arrays
May 2003