Integration of Nanostructured Titania (NST) into Microsystems
I. Introduction

Nanostructured titania (NST) is a versatile material with potential applications in energy conversion, separation, catalysis and chemical sensing. Our research is focused on realizing integration techniques that are CMOS compatible and developing in-depth materials/process knowledge-base for implementing these techniques. We are particularly interested in integrating NST into microsystems for biological, chemical sensing, tribological, and energy conversion applications, among others. Our work is interdisciplinary and involves collaboration with various research groups.

contact:, Adam Monkowski, Zuruzi Abu Samah

II. Integration

III. NST as Elements in Multiplex Sensing Systems

IV. NST as Adhesion Layer for Enhanced Cell Attachement