ME 141B/ME292/ECE141B Website!

Announcements:

Syllabus

Schedule

Guideline for Papers for Grad Students

Papers for Graduate Students:

Senturia, 2003 “Perspectives on MEMS, Past and Future: The Tortuous Pathway from Bright Ideas to Real Products” (Due 9/30/2010)

Spearing, 2000, “Materials Issues in MEMS” (Due 9/30/2010)

Hopcroft 2010, “What is the Young’s Modulus of Silicon?” (Due 10/7/2010)

Deal and Grove, 1965 “General Relationship for the Thermal Oxidation of Silicon” (Due 10/14/2010)

Whitesides, 1997 “Soft lithographic methods for nano-fabrication” (Due 10/21/2010)

Spearing, 2002 “Effect of Process Parameters on the Surface Morphology and Mechanical Performance of Silicon Structures After DRIE” (Due 10/28/2010)

Bozorgi 2010, “Application of Millisecond Pulsed Laser Welding in MEMS Packaging” (Due 11/04/2010)

Douglass, 2003 “DMD Reliability: a MEMS success story”) (Due 11/12/2010)

Homeworks:

Getting Started with L-Edit (Due 10/7/2010)

Mask Design Homework (Due 10/14/2010)

Alignment

Align.tbd

electrodes.tbd

PRACTICE HOMEWORK #1 (from last year)

PRACTICE HOMEWORK #1 Solutions (from last year)

Actual HOMEWORK #1 (DUE 10/28/2010)

PRACTICE HOMEWORK #2 with solutions

MIDTERM!!! (DUE 11/12/2010 ESB 3231C by 5:00pm)

Labs:

General Lab Report Guidelines

Process Outline

Lab Report #1 (Due 10/19/2010)

Lab Report #2 (Due 11/18/2010)

Lab Report #3 (Due 12/11/2010)

Lecture Notes:

Lecture 1 (9/23/2010)

Lecture 2 (9/28/2010)

Lecture 3 (10/5/2010)

Lecture 4 (10/7/2010)

Lecture 5 (10/12/2010)

Lecture 6 (10/14/2010)

Lecture 7 (10/21/2010)

Lecture 8 (10/28/2010)

Lecture 9 (11/01/2010)

Lecture 10 (11/04/2010)

Lecture 11 (11/09/2010)

Lecture 12 (11/16/2010)